Aluminum Vacuum Chuck Fixture Plate O-Ring Sealing Grooves 5-Axis Machined 0.005mm
Vacuum Zone Fixture Plate
,O-Ring Groove Vacuum Chuck
,Aluminum Vacuum Chuck Plate
This vacuum chuck fixture plate is machined from 6061-T6 plate with a network of vacuum channels and continuous O-ring sealing grooves that divide the working face into independent holding zones. Each zone is sealed by its own groove and vented by its own vacuum port, so a small part can be held on one zone while the rest of the plate stays open. The plate is used for thin-wall and non-magnetic workpieces that cannot be clamped mechanically: optical housings, thin aluminium covers, PCB carriers, glass and ceramic parts and wafer-type substrates where clamping marks are not acceptable.
The critical dimension on this plate is not the outside shape but the flatness of the working face after the channels are cut, because the channels relieve internal stress in the plate and the face moves if the sequence is wrong.
| Step | Operation and control point |
|---|---|
| 1. Plate selection | 6061-T6 plate cut oversize; thickness measured at nine points and mill certificate recorded, so both faces have enough stock to clean up. |
| 2. Face machining, both sides | Both faces milled in one setup with the plate supported on parallels, then flipped and re-cut; flatness checked at 0.02mm before channel work starts. |
| 3. Stress equalization | Plate rested after roughing the channel grid so the relieved stress settles before the finishing pass. |
| 4. Vacuum channel milling | Channel grid cut with small end mills, depth 1.5-3mm, channel width 2-4mm; all channels of one zone connected in a single continuous path. |
| 5. O-ring groove machining | Sealing grooves milled around each zone, groove width and depth held to +/-0.02mm with a 0.4um floor finish so the O-ring seats without leaking. |
| 6. Vacuum port drilling | Port holes drilled from the edge into each zone circuit, intersecting the channel cleanly and deburred so flow is not restricted. |
| 7. Locating and mounting holes | Dowel pin holes reamed to H7 and tapped mounting holes added, position +/-0.02mm from the plate datum, checked against the machine table pattern. |
| 8. Edge chamfer and deburr | All channel edges broken to 0.2mm so gaskets are not cut and parts are not scratched. |
| 9. Flatness and leak check | Working face re-checked on a granite surface plate for 0.005-0.01mm flatness; each zone vacuum tested with a blanking plate to confirm no cross-leak between zones. |
| 10. Surface treatment | Clear or black anodizing with the working face masked, or hard anodizing for abrasive part contact. |
| Working face flatness | 0.005-0.01mm over the full plate |
| Parallelism between faces | 0.01mm |
| Channel depth | +/-0.05mm |
| O-ring groove width and depth | +/-0.02mm |
| Groove floor roughness | Ra 0.4um |
| Dowel hole | H7 reamed, position +/-0.02mm |
| Vacuum port position | +/-0.05mm |
| Zone isolation | No cross-leak, each zone vacuum tested |
| Plate thickness | +/-0.05mm |
| General tolerance | +/-0.01mm critical, +/-0.05mm general |
Thin plates distort when material is removed from one face, so the channel grid is roughed on a stress-relieved blank, the plate is allowed to settle, and the final face pass is taken with light depth of cut on both sides. That is what keeps flatness at 0.005-0.01mm rather than drifting after the channels are cut.
Zone layout follows your part geometry, so the plate is designed around what you need to hold.
- Plate sizes from 150 x 150mm to 800 x 500mm, thickness 15-60mm.
- Zone count from 1 to 24, with zone shapes matched to your workpiece footprint, including ring zones for round parts.
- Channel and groove geometry per zone: continuous O-ring groove, double groove for high differential pressure, or porous insert pockets.
- Ports: side entry, bottom entry, or a manifold groove feeding several zones from one vacuum source.
- Interface features: machine table dowel pattern, T-slot alignment, lifting holes, robot handling features, barcode or laser marking.
- Materials: 6061-T6 for general use, 7075-T6 for higher stiffness, 5083 for corrosion resistance, 316L stainless for clean or wet processes.
- Finishes: clear or black anodizing with working face masked, hard anodizing for abrasive contact, PTFE coating on request.
- Prototype from 1 piece, with the same program and probing routine kept for repeat orders.
Send a workpiece sketch with the areas that must not be clamped, plus your vacuum source pressure, and our engineering team returns a zone layout proposal with holding force estimate and a quote, usually within one to two working days.
Dongguan Changxinda Precision Technology Co., Ltd has produced custom CNC parts since 2008 from Dongguan, Guangdong, China. The facility runs 4-axis and 5-axis machining centers, turn-mill combined lathes and CNC lathes with around 100 employees, including dedicated CAM programming and quality teams. More than 200 customers are served in medical equipment, robotics, automotive, aerospace, automation, laser, LED, lithium battery and precision testing instruments, and 50-60 percent of production is exported. The company is ISO 9001:2015 certified, with annual sales between USD 10 and 20 million and in-house inspection on CMM, granite surface plates and optical equipment. Fixture plates, vacuum chucks and multi-zone sealing plates are routine work, drawing on the same capability used for vacuum chamber and fluid handling components.
- Monthly capacity above 10,000 pieces across the fixture plate family, with reserved capacity for repeat programmes.
- Typical lead time: 3-7 days for prototypes, 7-14 days for 10-100 pieces, 14-30 days for mass production.
- Programs, probing routines, sealing test fixtures and the approved first article are archived against your part number, so repeat lots skip programming and leak-test setup.
- Flatness and zone leak test reports ship with every lot, keeping incoming inspection short.
- Rush service and scheduled release shipping available for projects with a fixed line-side date.
- Export packaging: face protected with film and foam, corner guards, desiccant, crate or pallet for LCL and FCL.
Thin-wall aluminium and stainless covers, optical and laser module housings, glass and ceramic substrates, PCB and FPC carriers, wafer-type fixtures, non-magnetic parts on 5-axis tables, inspection and CMM holding fixtures, and custom non-standard vacuum holding plates built to customer part geometry.
How many zones can one plate have?
Between 1 and 24 zones, depending on plate size and part footprint. Each zone is sealed with its own O-ring groove and vented through its own port, so a small part can be held on one zone while the others remain open, and zone isolation is verified with a blanking plate before shipment.
Will the plate stay flat after the channels are cut?
Yes, if the sequence is right. The channel grid is roughed on a stress-relieved blank, the plate is allowed to settle, and finishing is taken on both faces with light cuts. Working face flatness is then verified on a granite plate at 0.005-0.01mm and reported per lot.
Can you design a custom zone layout for my part?
That is the normal case. Send a workpiece sketch marking the areas that can be held and the areas that must stay free, plus your vacuum source, and we propose a zone layout with a holding force estimate before quoting.
Does anodizing affect the sealing grooves?
The working face and groove floors can be masked before anodizing so the sealing geometry is unaffected, or the plate can be hard anodized when abrasive parts are held. We confirm which option fits your part material during the DFM review.
How is repeat-order quality kept stable?
Programs, probing routines, leak-test fixtures and the approved first article are archived against your part number, and repeat lots are booked against reserved capacity above 10,000 pieces per month. Every lot ships with flatness and zone leak test data.